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Active Tunable THz Metamaterial Array Implemented in CMOS Technology Yongshan Liu 1,2,3 † , Tong Sun 1,2 † , Xiaojun Wu 4 *, Zhongyang Bai 4 , Yun Sun 1,3 , Helin Li 1,2 , Haoyi Zhang 1 , Kanglong Chen 4 , Cunjun Ruan 4 , Yuzu Sun 1,2 , Yuanqi Hu 1,2,3 , Tianxiao Nie 1,2,3 *, Lianggong Wen 1,2,3 * 1 School of Microelectronics, Beihang University, Beijing, 100191, China. 2 Beihang-Goertek Joint Microelectronics Institute, Qingdao Research Institute, Beihang University, Qingdao, 266000, China. 3 Hefei Innovation Research Institute, Beihang University, Hefei 230013, China. 4 School of Electronics and Information Engineering, Beihang University, Beijing 100191, China. † These authors contributed equally to this paper. *Correspondence: Lianggong Wen Email: wenlg@buaa.edu.cn Tianxiao Nie Email: nietianxiao@buaa.edu.cn Xiaojun Wu Email: xiaojunwu@buaa.edu.cn Abstract
采用 CMOS 技术实现的主动可调 THz 超材料阵列
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