人们正在考虑在下一代光刻节点中使用 Ta 基吸收体的替代品,以减少 3D 掩模效应并通过相位干涉改善图像调制。低复折射率 (n-ik) 材料可以在比传统吸收体所需厚度更薄的情况下提供相移行为,本质上充当衰减相移掩模 (attPSM) 膜。确定 attPSM 吸收体厚度和随之而来的相位需要确定最佳相移掩模反射率。使用高反射率吸收体进行成像可显示出更好的成像性能。吸收体厚度是在干涉效应导致高吸收体反射率的地方确定的。因此,低折射率 (n) 材料是理想的 attPSM 吸收体候选材料。使用维纳边界和有效介质近似 (EMA) 建模确定的低 - n 材料组合使用吸收体反射率在线空间和接触孔图案针对 NILS 和 MEEF 进行优化。使用反射近场强度成像将接触孔最佳厚度的吸收体候选物与传统的 Ta 基吸收体进行了比较。
Murukarthck Jayakodi 1,31,34 , Qiongxian Luke 2,3,34 , M. Timothy Rabanus-Wallace 1,34 , Micha Bayer 4 , Thomas Lux 5 , Benjamin Jaegle 6 , Wubishet Bekele 9,32 , Brett Chavang 10 , Boyke jørgensen 2 , Jia-wu Febig 1 , Anne Fiebig 1 , Hedrun Gundlach 5 , Georg Ha Berer 5 , Mats Hansson 13 , Axel HimMelbach 1 , iris Hoffe 1 , Robert 1 , Haifei Hu 12,14 , Sachiko Isobe 15 , Sandic M. Kale 2,33 6 , Manuela KNAAFT 1 , Simon G. Krattinger 17 , Jochen Kumlehn 1 , Chengdao Li 12,18,19 , Marone 1 , Andreas Maurer 20 , Klaus F. X. Mayer 1 , 22 , Emiko Murozuka 20 , Pierre A. Pierre A. 24 ro sato 15,27 , danta schüler 1 , Thomas Schmutzer , Uwe Scholz 1 , Miriam Schreiber 4 n 2 , Josquin F. TIBBTS 16 , Martin Toft Simmelsgard Nielsen 2 , Cynthia Voss 2 , Penghao Wang 12 , Robbie Waught 12 n 2 , Runxuan Zhang 4 , Xiao-Qi Zhang 12 , Thomas Wicker 6 ✉ , Christophy Dockter 2 ✉ , Martin Mascher 1,30 ✉ & Nils Stein 1,20 ✉
1- 法国维勒班克劳德贝尔纳里昂大学; 2- 法国里昂 Léon Bérard 中心人文与社会科学系; 3- 法国马赛艾克斯马赛大学,INSERM,IRD,SESSTIM,ISSPAM 4- 法国马赛 Paoli-Calmettes 研究所,CanBios UMR1252 通讯作者:Sylvain Besle besle.sylvain@gmail.com 致谢 我们要感谢 Dominique(Patrick 的妻子)和他的儿子 Leo 花时间和信任回答我们的问题。他们的名字均已更改,以尊重社会科学研究中的匿名规则。我们还要感谢 2008 年对 Patrick 进行采访的 Juliette Sakoyan 和将本文原版翻译成英文的 Jessica Blanc 博士。Cinzia Greco 和 Nils Graber 对本文手稿的评论十分有益。我们也感谢匿名审稿人对本文各次修改提出的有益建议。根据当地法律,这项工作未接受伦理审查。资金作者报告称,本文所述工作没有资金支持。
Sven Dorkenwald 1,2 , Arie Matsliah 1 , Amy R Sterling 1,3 , Philipp Schlegel 4,5 , Szi-chieh Yu 1 , Claire E. McKellar 1 , Albert Lin 1,6 , Marta Costa 5 , Katharina Eichler 5 , Yijie Yin 5 , Will Silversmith 1 , Casey Schneider-Mizell 7 , Chris S. Jordan 1 , Derrick Brittain 7 , Akhilesh Halageri 1 , Kai Kuehner 1 , Oluwaseun Ogedengbe 1 , Ryan Morey 1 , Jay Gager 1 , Krzysztof Kruk 3 , Eric Perlman 8 , Runzhe Yang 1,2 , David Deutsch 1,9 , Doug Bland 1 , Marissa Sorek 1,3 , Ran卢 1 , Thomas Macrina 1,2 , Kisuk Lee 1,10 , J. Alexander Bae 1,11 , Shang Mu 1 , Barak Nehoran 1,2 , Eric Mitchell 1 , Sergiy Popovych 1,2 , Jingpeng Wu 1 , Zhuan Jia 1 , Manuel Castro 1 , Nico Kemnitz 1 , Dodam Ih 1 , Alexander Shakeel Bates 4,5,12,13 , Nils Eckstein 14 , Jan Funke 14 , Forrest Collman 7 , Davi D. Bock 15 , Gregory SXE Jefferis 4,5 , H. Sebastian Seung 1,2 * , Mala Murthy 1 *, FlyWire 联盟 +
Forename Surname Organisation Alan McKerns 1Stopwind Jim Russell 1Stopwind Liam Moore 2H Offshore Stuart Little 4MS Network Solutions Hugh Mackay 4MS Network Solutions Nils Gunnar Viko 4Subsea Leona Jeffrey 4Subsea Alistair Stewart AAB Jordan Taylor AAB Diogo Costa ABB Anton Janssens ABS Allan Carlin Access Talent Group Roberta Amerise Acteon UTEC Greg Hammond Acteon UTEC Ben Johnston Acteon UTEC Alan Duncan AD Marine Scotland Paul McFarlane AECOM Steven Whyte AECOM Jānis Klavins Aerones Adam Hollis Aggregate Industries Matthew McLean Airspection Brea Stephenson Aisus Natalia Arakelova Aker Solutions Kristian Mikalsen Aker解决方案Neil Wilkinson Aker Solutions Andrew Clark Alpha Pro解决方案Dave Hamill Altrad Sparrows Matthew Paterson Amos Group Nigel Robinson Group Nigel Robinson Apollo David Stewart David Stewart Apollo Neil McEwan Apollo Neil McEwan Aquallite数据
Akhmedova, Shakhnaz; Körber, Nils Xia, Yulong; Zhang, Jianwei Srivastava, Adit ; Ramagiri, Aravind; Gupta, Puneet; Gupta , Vivek Cao, Zongjing; Li, Yan; Shin, Byeong-Seok Yang, Chuhong; Li, Bin; Wu, Nan Chen, Shangyu; Yang, Xiaohao; Fang, Pengfei; Harandi, Mehrtash; Phung, Dinh Q; Cai, Jianfei Cheng, Zhen; Zhu, Fei; Zhang, Xu-Yao; Liu, Cheng-Lin Huang, Zhixin; He, Yujiang; Nivarthi, Chandana Priya; Sick, Bernhard; Gruhl, Christian Kim, Hye-Geun; Na, You-Kyoung; Joe, Hae-Won; Moon, Yong-Hyuk; Cho, Yeong-Jun Hasan, Kazi Reyazul; Adnan, Muhammad Abdullah Lee, Ming-Han; Zhang, Yu Chen; WU, KUN-RU; Tseng, Yu- Chee Xu, Jingwen; Wei, Xiaoge; Yuen, PongChi Muth, Markus; Sablatnig, Robert; Peer, Marco; Kleber, Florian Mathew, Minesh; Mondal, Ajoy; Jawahar, C.V. Xu, Shuo; Zhuang, Zeming; Li, Mingjun; Su, Feng Han, Zhiwang; Yadikar, Nurbiya; Xuebin, Xu; Aysa, Alimjan ; Ubul, Kurban
Xingfan Huang 1:2,21,Henck 3:4,21,,Wing-Lee Chan 8.9,Alexandra Despang 4.9,4.9,冰雹4.8,9,炒4,弗里德睡眠4,库珀·马歇尔,萨斯查·乌尔夫斯8,9,萨斯萨尔8,9,威特勒·拉尔斯4,维特勒·拉尔斯4,wittler lars 4,wittler lars 4,wittler lars yiwen zhu 7,yiwen zhu khu 7,yiwen zhu kire kur 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4. Ingn in. Ingnel in. Ingnel in. 1,13.17,Junyue Cao
∗ 本文之前以“安全资产的稀缺性和全球中性利率”为标题发表。此版本:2021 年 3 月。第一版:2019 年 6 月。本文中表达的观点仅由我们负责,不应被解释为反映美联储理事会或与美联储系统有关的任何其他人员的观点。我们要感谢 Shaghil Ahmed、Richard Clarida、Christopher Erceg、Etienne Gagnon、Marc Giannoni、Simon Gilchrist、Nils Gornemann、Joseph Gruber、Andrea Pescatori、Andrea Raffi、Ricardo Reyes-Heroles、Marcelo Rezende、John Rogers、Frank Warnock 以及美联储委员会、国际货币基金组织、达拉斯联储和亚特兰大联储的研讨会参与者提出的非常有用的评论和建议。我们非常感谢匿名审阅者的评论。我们还要感谢 Caitlin Dutta、Kaede Johnson、Isabel Juniewicz、Ben Smith、Lizzy Stanton 和 Nicolas Savignon 的出色研究协助。† 联邦储备委员会国际金融部,第 20 街和 C 街西北,华盛顿特区 20551。电子邮件:thiago.r.teixeiraferreira@frb.gov。‡ 联邦储备委员会国际金融部,第 20 街和 C 街西北,华盛顿特区 20551。电子邮件:samer.f.shousha@frb.gov。
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