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There are four typical approaches to synthesis silane gas: a) magnesium silicide with mineral acids; b) lithium hydride with trichlorosilane (SiHCl 3 , TCS) or silicon tetrachloride (SiCl 4 , STC); c) silicon tetrafluoride with sodium aluminum tetrahydride; d) catalytic redistribution of chlorosilanes. Among these methods, the trichlorosilane redistribution method is the workhorse due to its convenient combination with the modified Siemens process for polysilicon production, however, the redistribution reaction is characterized by low to 0.2% equilibrium conversion in thermodynamics. The conventional solution is to execute the process with a two-step method that employs two fixed-bed reactors and three distillation columns, being faced with large amount of material circulation and huge energy consumption.
Reactive Distillation Assisted Electronic Grade Silane Gas Production: From Basic
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