Physical Basis of Microelectronics EEL 5382 3 Integrated Circuit Technology EEE 5356 3 Integrated Systems Technologies EEE 6357 3 Semiconductor Device Theory I EEL 6353 3 Semiconductor Device Theory II EEL 6354 3 MEMS I/Chem Bio Sensors EEE 6276 3 MEMS II EEE 6278 3 3.选修课**:3-6小时(论文/非论文)系统在芯片EEE 6412 3模拟CMOS/VLSI设计EEL 6357 3