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•金属离子净化器3M™金属离子净化器旨在将高纯度溶剂系统中的金属离子降低至50ppt水平。Utilizing 3M's immobilized particle technology, which is comprised of either a strong acid cation exchange resin or a chelating ion exchange resin in a polyethylene matrix, 3M Metal Ion Purifiers provide effective, single pass reduction of metal ions from high purity resins and solvents, such as PGMEA, TMAH, BARC, and other lithography chemistries.
3M SPSD工业部门手册USAC_3-30.Indd
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