简要摘要:3、4、6 面“宙斯盾”系统。爱国者现拥有 GaN AESA;S/X 波段 AMDR 提供的灵敏度和轨道数量是 SPY-1D(V) 的 30 倍;低成本封装:使用 COTS、PCB ;极端 MMIC:片上 32 元件 60 GHz T/R 阵列;数字波束成形 (DBF):每个元件均采用 A/D 技术;材料:GaN 现在可以在相同占用空间内提供 5 倍到 10 倍 GaAs 的功率,成本降低 38%,MTBF 为 1 亿小时;MIMO(多输入多输出):有意义的地方;超材料天线:1000 美元的 20 GHz 和 30 GHz AESA;非常低成本的系统:汽车雷达成本不到 100 美元,未来只需几美元:MEMS:移相器;MEMS 压电材料 = piezoMEMS:用于飞行昆虫机器人;印刷电子:低成本 1.6 GHz(目标 2.4 GHz)印刷二极管;同一芯片上的电信号和光信号;硅中的红外透明;石墨烯和碳纳米管 (CNT):太赫兹晶体管时钟速度的潜力;革命性的 3-D 微加工;超导性;可生物降解的晶体管或 LED 阵列:嵌入用于检测癌症或低血糖;量子雷达:查看隐形目标;
拆卸和更换 IC 和 MMIC(单片微波集成电路)尤其成问题。此返工步骤涉及将组件局部加热至下方环氧树脂的玻璃化转变温度 (Tg) 以上,将平头螺丝刀或工具放在芯片下方并将其挖出。这不可避免地会造成松散的 FM/FOD(异物/异物碎片)等附带损害,因为芯片可能会破碎并对附近的组件造成意外的附带损害。这些松散的导电颗粒是任何腔体密封设备的主要可靠性问题,并且在所有 MIL-STD-883 目视检查测试方法中都得到了详细解决。然后必须将干燥的银环氧树脂刮干净并涂上新的湿环氧树脂。必须小心地放置新组件并将其第二次送入固化炉。接下来是在加热台上进行引线接合,可能借助离线手动引线接合机。然后必须将混合组件赶上批次并送去进行第二轮筛选测试。对于军事工作来说,记录所有这些信息简直是噩梦,而且很难计算返工周期的成本。对未粘住的电线或粘合过度并因脚跟裂纹而断裂的电线进行单独返工稍微容易一些,但仍然很成问题。
电气工程系 (www.iitk.ac.in/ee/) 提供几乎所有电气工程子学科的硕士、硕士 (R) 和博士课程。领域包括:信息和编码理论;通信、电信和无线网络;点对点网络;数字交换系统;航空电子和导航系统、5G/6G 无线技术;量子计算和通信、分子通信;人工智能和机器学习、数字信号和图像处理;计算机视觉;逆问题和断层扫描;信号与系统理论;控制系统和机器人;网络控制和电动汽车控制;电子和虚拟仪器;模糊逻辑;神经网络及其应用;电力系统经济学;优化;电力市场;电力系统保护;高压电介质和绝缘;高压直流输电和 FACTS、电能质量;智能电网和同步相量;电力电子;电力驱动微电网;微电子学;VLSI 系统设计;模拟和数字电路设计;半导体器件建模与仿真;固态器件;纳米电子学和纳米级器件;有机电子学;柔性电子学;光伏技术;电磁学;射频工程和微波;天线,超材料;MMIC;射频和微波传感器;RFID;微波和毫米波成像;射频能量收集、电磁和断层成像;太赫兹成像和测试;纳米光子学、等离子体学、基于量子点的器件;光电子学;光纤信号处理;非线性光纤;光纤传感器;量子密码学和量子光学;自旋波;光子网络和系统。
由于低成本无人机的扩散代表了安全性的潜在风险增加[1] [2],因此对小小的无人机的检测最近已成为一个非常重要的话题。FMCW雷达被认为是无人机检测的最合适的解决方案之一,因为其架构简单性和短距离检测能力[1] - [4]。对小型无人机的检测代表了一项具有挑战性的任务,因为它们的尺寸非常有限和非反射材料组成意味着非常小的雷达横截面(RCS)。出于这个原因,只能通过利用毫米波频率,高发射功率和具有低噪声图(NF)和高动态范围的接收器来实现雷达检测范围和分辨率的优化。在这种情况下,在性能方面,硝酸盐(GAN)微波技术代表了最佳解决方案,因为它们为发射器和接收器微波前端提供了最先进的优点图[4] - [6]。在微波频率下对上GAN功率密度的开发是实现紧凑,高功率发射器所需的优势,以增加无人机目标的弱回声信号(低RCS)。另一方面,由于低噪声和广泛的动态范围特征的结合,GAN技术在RX部分中也非常有吸引力[5] - [9]。在本文中,我们描述了一种基于GAN的Ka-band MMIC LNA,该LNA将在FMCW雷达的接收器中被利用,以进行小型无人机检测。This feature is of primary importance in a FMCW radar receiver for drone detection, since the LNA needs to detect very low drone-echo signals (close to the thermal noise level), while maintaining its linearity even in presence of strong interferer/blocking signals, which are typically due to radar clutter and the leakage of the power amplifier of its own transmitter [3][4].MMW-GAN技术的采用使得可以同时针对低NF,高增益和大型动态范围,从而导致上KA频段无与伦比的组合性能。
2019 年春,BAE 系统公司位于新罕布什尔州纳舒厄的微波南部 (MWS) 工厂正式开业,标志着 Ramp 2 Rate 计划的另一个重要里程碑得以实现,为本已令人印象深刻的微电子装配和测试自动化套件增添了最先进的能力和产能。Ramp 2 Rate 计划历时两年,投资 1 亿美元用于新资本和设施,扩大了 BAE 系统公司的电子战综合制造中心 (EW-IMC) 和 100,000 级洁净室的占地面积,并将微波生产线数量从 3 条增加到 10 条,以满足对射频电子战产品线前所未有的需求增长。新的 MWS 工厂增加了 16,000 平方英尺的 100,000 级洁净室空间,使总面积达到近 60,000 平方英尺。该工厂拥有两条微波生产线,专门用于大批量生产集成微波组件 (IMA),在过去两年中,为支持战斗机而完成的复杂 IMA 增长了 700% 以上,这为该工厂做出了巨大贡献。BAE Systems 所有微波工厂的先进微波生产线都采用自动化技术进行环氧树脂分配、GaAs 和 GaN MMIC 裸片拾取和放置,以及包含空气桥、金线和带状键合的其他无源元件,以及检查和电气测试。一切都旨在最大限度地减少接触时间、单元变化、缺陷可能性、调整和测试时间,同时提高整体工艺的可重复性和质量。为了满足需求增长和设施人员配备和资本扩张,以及确保 BAE Systems 的微电子员工队伍不断接受最新质量标准和运营流程的培训,
关键字:Gan,Mishemt,MBE,MMIC,AL 2 O 3,可靠性摘要雷神已经在<111> si Hemt技术上采用了分子束外延(MBE)开发了gan的状态。相对于MOCVD(〜1000 o C)的分子束外延(MBE)的较低生长温度(〜750 o C)导致热性能提高和从IIII-V/SI界面减少微波损失。这些因素结合起来,以使最有效的高功率(> 4 w/mm)在高频(≥10GHz)上进行操作,这些操作通常与Si上的gan hemts无关。较低的温度MBE生长过程减少了生长后冷却后的GAN拉伸应变,这又使Aln成核层用于GAN HEMT生长。这与基于MOCVD的生长中使用的复杂的Algan/Aln菌株补偿层相反,这些层已显示出显着降低IIII-V外延层的总体导热率。此外,低温MBE ALN成核层导致Si/IIi-氮化物界面处的界面电荷降低。这种大大降低的电荷使雷神能够实现<0.2dB/mm的创纪录的低微波损失(对于SI上的GAN),最高为35 GHz,可与SIC上的GAN相当[1]。最重要的是,在100mm高电阻(> 1,000 ohm-cm)上实现MBE种植的Gan Hemt Epi层质量和均匀性时,记录了创纪录的低微波损失(> 1,000 OHM-CM)<111> Si,可与MOCVD在SIC上生长的GAN相当。板电阻低至423欧姆 /平方英尺(±0.8%),迁移率为〜1,600 cm 2 /v-s。这样做是为了使整个栅极电容,IDSS,IMAX和V t与为了减少门泄漏,雷神用ALD沉积了Al 2 O 3作为高k栅极介电介质形成不幸的。为了最大程度地减少门泄漏,而不会影响关键的RF设备特性(例如FT,FMAX,POWER和PAE),使用电荷平衡模型与栅极介电堆栈一起设计Schottky层厚度。
10.58。硬件综合和优化-T-Etit-113922 ..................................................................................................................................................................................................................................................................................................................... 414 10.59。hardware/software co-design-T-etit-100671 ........................................................................................................... 415 10.60. High-performance microwave technology-T-E-ETIT-100791 ............................................................................................................................................................. High-voltage testing technology-T-E-ETIT-101915 .............................................................................................................. 417 10.62. high voltage technology-T-ETIT-1110266 .................................................................................................................... 418 10.63. industrial business management-T-WIWI-100796 ........................................................................................................... 419 10.64. Information fusion-T-E-ETIT-106499 ............................................................................................................................... 420 10.65. Information technology in industrial automation-T-E-E-ETIT-100698 ......................................................................................................................... Innovation Lab-T-E-ETIT-1110291 .............................................................................................................................................................................hardware/software co-design-T-etit-100671 ........................................................................................................... 415 10.60.High-performance microwave technology-T-E-ETIT-100791 ............................................................................................................................................................. High-voltage testing technology-T-E-ETIT-101915 .............................................................................................................. 417 10.62. high voltage technology-T-ETIT-1110266 .................................................................................................................... 418 10.63. industrial business management-T-WIWI-100796 ........................................................................................................... 419 10.64. Information fusion-T-E-ETIT-106499 ............................................................................................................................... 420 10.65. Information technology in industrial automation-T-E-E-ETIT-100698 ......................................................................................................................... Innovation Lab-T-E-ETIT-1110291 .............................................................................................................................................................................High-performance microwave technology-T-E-ETIT-100791 .............................................................................................................................................................High-voltage testing technology-T-E-ETIT-101915 .............................................................................................................. 417 10.62. high voltage technology-T-ETIT-1110266 .................................................................................................................... 418 10.63. industrial business management-T-WIWI-100796 ........................................................................................................... 419 10.64. Information fusion-T-E-ETIT-106499 ............................................................................................................................... 420 10.65. Information technology in industrial automation-T-E-E-ETIT-100698 ......................................................................................................................... Innovation Lab-T-E-ETIT-1110291 .............................................................................................................................................................................High-voltage testing technology-T-E-ETIT-101915 .............................................................................................................. 417 10.62.high voltage technology-T-ETIT-1110266 .................................................................................................................... 418 10.63. industrial business management-T-WIWI-100796 ........................................................................................................... 419 10.64. Information fusion-T-E-ETIT-106499 ............................................................................................................................... 420 10.65. Information technology in industrial automation-T-E-E-ETIT-100698 ......................................................................................................................... Innovation Lab-T-E-ETIT-1110291 .............................................................................................................................................................................high voltage technology-T-ETIT-1110266 .................................................................................................................... 418 10.63.industrial business management-T-WIWI-100796 ........................................................................................................... 419 10.64. Information fusion-T-E-ETIT-106499 ............................................................................................................................... 420 10.65. Information technology in industrial automation-T-E-E-ETIT-100698 ......................................................................................................................... Innovation Lab-T-E-ETIT-1110291 .............................................................................................................................................................................industrial business management-T-WIWI-100796 ........................................................................................................... 419 10.64.Information fusion-T-E-ETIT-106499 ............................................................................................................................... 420 10.65. Information technology in industrial automation-T-E-E-ETIT-100698 ......................................................................................................................... Innovation Lab-T-E-ETIT-1110291 .............................................................................................................................................................................Information fusion-T-E-ETIT-106499 ............................................................................................................................... 420 10.65.Information technology in industrial automation-T-E-E-ETIT-100698 ......................................................................................................................... Innovation Lab-T-E-ETIT-1110291 .............................................................................................................................................................................Information technology in industrial automation-T-E-E-ETIT-100698 .........................................................................................................................Innovation Lab-T-E-ETIT-1110291 .............................................................................................................................................................................Innovation Lab-T-E-ETIT-1110291 .............................................................................................................................................................................Integrated intelligent sensors-T-E-E-ETIT-100961 ........................................................................................................... 423 10.68.Integrated systems and circuits-T-E-E-ETIT-100972 .................................................................................................. 424 10.69.互化团队Project-T-E-Etit-106110 ................................................................................................................................................................................................................................................................................................................................... 425 10.70。汽车和工业激光雷达技术简介-111011 .............................................................................................................................................................................................................................................................................................................Introduction to the Scientific Method (Seminar)-T-E-ETIT-11317 ......................................................................................................... 427 10.72. IT/OT-Security Seminar-T-E-ETIT-113648 ................................................................................................................ 428 10.73. Lab Course on Noise Thermometry-T-E-ETIT-112714 .................................................................................................................... 429 10.74. Lab Course Printed Flexible Electronics-T-E-ETIT-113075 ............................................................................................... 430 10.75. Laboratory Technology-T-E-ETIT-111009 ........................................................................................................................................................................................... human-machine interaction in anthropomatic: Basic knowledge-T-Info-101361 ........................................... 450 10.95.Introduction to the Scientific Method (Seminar)-T-E-ETIT-11317 ......................................................................................................... 427 10.72.IT/OT-Security Seminar-T-E-ETIT-113648 ................................................................................................................ 428 10.73. Lab Course on Noise Thermometry-T-E-ETIT-112714 .................................................................................................................... 429 10.74. Lab Course Printed Flexible Electronics-T-E-ETIT-113075 ............................................................................................... 430 10.75. Laboratory Technology-T-E-ETIT-111009 ........................................................................................................................................................................................... human-machine interaction in anthropomatic: Basic knowledge-T-Info-101361 ........................................... 450 10.95.IT/OT-Security Seminar-T-E-ETIT-113648 ................................................................................................................ 428 10.73.Lab Course on Noise Thermometry-T-E-ETIT-112714 .................................................................................................................... 429 10.74. Lab Course Printed Flexible Electronics-T-E-ETIT-113075 ............................................................................................... 430 10.75. Laboratory Technology-T-E-ETIT-111009 ........................................................................................................................................................................................... human-machine interaction in anthropomatic: Basic knowledge-T-Info-101361 ........................................... 450 10.95.Lab Course on Noise Thermometry-T-E-ETIT-112714 .................................................................................................................... 429 10.74.Lab Course Printed Flexible Electronics-T-E-ETIT-113075 ............................................................................................... 430 10.75.Laboratory Technology-T-E-ETIT-111009 ........................................................................................................................................................................................... human-machine interaction in anthropomatic: Basic knowledge-T-Info-101361 ........................................... 450 10.95.Laboratory Technology-T-E-ETIT-111009 ...........................................................................................................................................................................................human-machine interaction in anthropomatic: Basic knowledge-T-Info-101361 ........................................... 450 10.95.Labor Circuit design-T-E-ETIT-100788 ....................................................................................................................... 432 10.77. Laboratory Modern Software Tools in Power Engineering-T-E-E-ETIT-1110898 .............................................................................. 433 10.78. LASER METROLOGY-T-ETIT-100643 .............................................................................................................................. 434 10.79. Laser Physics-T-E-ETIT-100741 ............................................................................................................................ 435 10.80. Power electronics for photovoltaics and wind energy-T-E-ETIT-104569 ................................................................... 436 10.81. Power electronic systems in energy technology-T-E-ETIT-112286 ....................................................................... 437 10.82. lighting technology-T-E-ETIT-100772 ......................................................................................................................................................... 438 10.83. Light and Display Engineering-T-E-ETIT-100644 ........................................................................................................ 439 10.84. Lighting Design - Theory and Applications - T -E -ETIT -100997 .................................................................................................................................Labor Circuit design-T-E-ETIT-100788 ....................................................................................................................... 432 10.77.Laboratory Modern Software Tools in Power Engineering-T-E-E-ETIT-1110898 .............................................................................. 433 10.78.LASER METROLOGY-T-ETIT-100643 .............................................................................................................................. 434 10.79. Laser Physics-T-E-ETIT-100741 ............................................................................................................................ 435 10.80. Power electronics for photovoltaics and wind energy-T-E-ETIT-104569 ................................................................... 436 10.81. Power electronic systems in energy technology-T-E-ETIT-112286 ....................................................................... 437 10.82. lighting technology-T-E-ETIT-100772 ......................................................................................................................................................... 438 10.83. Light and Display Engineering-T-E-ETIT-100644 ........................................................................................................ 439 10.84. Lighting Design - Theory and Applications - T -E -ETIT -100997 .................................................................................................................................LASER METROLOGY-T-ETIT-100643 .............................................................................................................................. 434 10.79.Laser Physics-T-E-ETIT-100741 ............................................................................................................................ 435 10.80. Power electronics for photovoltaics and wind energy-T-E-ETIT-104569 ................................................................... 436 10.81. Power electronic systems in energy technology-T-E-ETIT-112286 ....................................................................... 437 10.82. lighting technology-T-E-ETIT-100772 ......................................................................................................................................................... 438 10.83. Light and Display Engineering-T-E-ETIT-100644 ........................................................................................................ 439 10.84. Lighting Design - Theory and Applications - T -E -ETIT -100997 .................................................................................................................................Laser Physics-T-E-ETIT-100741 ............................................................................................................................ 435 10.80.Power electronics for photovoltaics and wind energy-T-E-ETIT-104569 ................................................................... 436 10.81. Power electronic systems in energy technology-T-E-ETIT-112286 ....................................................................... 437 10.82. lighting technology-T-E-ETIT-100772 ......................................................................................................................................................... 438 10.83. Light and Display Engineering-T-E-ETIT-100644 ........................................................................................................ 439 10.84. Lighting Design - Theory and Applications - T -E -ETIT -100997 .................................................................................................................................Power electronics for photovoltaics and wind energy-T-E-ETIT-104569 ................................................................... 436 10.81.Power electronic systems in energy technology-T-E-ETIT-112286 ....................................................................... 437 10.82.lighting technology-T-E-ETIT-100772 ......................................................................................................................................................... 438 10.83. Light and Display Engineering-T-E-ETIT-100644 ........................................................................................................ 439 10.84. Lighting Design - Theory and Applications - T -E -ETIT -100997 .................................................................................................................................lighting technology-T-E-ETIT-100772 ......................................................................................................................................................... 438 10.83.Light and Display Engineering-T-E-ETIT-100644 ........................................................................................................ 439 10.84. Lighting Design - Theory and Applications - T -E -ETIT -100997 .................................................................................................................................Light and Display Engineering-T-E-ETIT-100644 ........................................................................................................ 439 10.84.Lighting Design - Theory and Applications - T -E -ETIT -100997 .................................................................................................................................Lighting Design - Theory and Applications - T -E -ETIT -100997 .................................................................................................................................Communications-t-e-etit-1123中的机器学习和优化..................................................................................................................................................................................................................................................................................................................................................................................................................................................................... 441 10.86。Machine Learning and Optimization in Energy Systems-T-WiWi-113073 ......................................................................................................... Machine Vision-T-Mach-105223 ............................................................................................................................................................................. 机器学习1-基本过程-T -WIWI -106340 ........................................................................................................................................................................................................................................................................................... 444 10.89。 机器学习2-高级过程-T -WIWI -106341 ....................................................................................................................................................................................... 445 10.90。 Master thesis-T-E-ETIT-100987 ................................................................................................................................ 446 10.91. 指导和导航T-E-Etit-113425的医学图像处理.......................................................................................................................................................................................... 447 10.92。 Medical measurement technology-T-E-ETIT-113607 ........................................................................................................................................................... Mensch-machine interaction-T-Info-101266 ................................................................................................................... 449 10.94. 微波技术/微波工程-T-E-ETIT-100802 ...........................................................................................................................................................................................................................................................................................................................................................................................................................................................................................................Machine Learning and Optimization in Energy Systems-T-WiWi-113073 .........................................................................................................Machine Vision-T-Mach-105223 ............................................................................................................................................................................. 机器学习1-基本过程-T -WIWI -106340 ........................................................................................................................................................................................................................................................................................... 444 10.89。 机器学习2-高级过程-T -WIWI -106341 ....................................................................................................................................................................................... 445 10.90。 Master thesis-T-E-ETIT-100987 ................................................................................................................................ 446 10.91. 指导和导航T-E-Etit-113425的医学图像处理.......................................................................................................................................................................................... 447 10.92。 Medical measurement technology-T-E-ETIT-113607 ........................................................................................................................................................... Mensch-machine interaction-T-Info-101266 ................................................................................................................... 449 10.94. 微波技术/微波工程-T-E-ETIT-100802 ...........................................................................................................................................................................................................................................................................................................................................................................................................................................................................................................Machine Vision-T-Mach-105223 .............................................................................................................................................................................机器学习1-基本过程-T -WIWI -106340 ........................................................................................................................................................................................................................................................................................... 444 10.89。机器学习2-高级过程-T -WIWI -106341 ....................................................................................................................................................................................... 445 10.90。Master thesis-T-E-ETIT-100987 ................................................................................................................................ 446 10.91. 指导和导航T-E-Etit-113425的医学图像处理.......................................................................................................................................................................................... 447 10.92。 Medical measurement technology-T-E-ETIT-113607 ........................................................................................................................................................... Mensch-machine interaction-T-Info-101266 ................................................................................................................... 449 10.94. 微波技术/微波工程-T-E-ETIT-100802 ...........................................................................................................................................................................................................................................................................................................................................................................................................................................................................................................Master thesis-T-E-ETIT-100987 ................................................................................................................................ 446 10.91.指导和导航T-E-Etit-113425的医学图像处理.......................................................................................................................................................................................... 447 10.92。Medical measurement technology-T-E-ETIT-113607 ........................................................................................................................................................... Mensch-machine interaction-T-Info-101266 ................................................................................................................... 449 10.94. 微波技术/微波工程-T-E-ETIT-100802 ...........................................................................................................................................................................................................................................................................................................................................................................................................................................................................................................Medical measurement technology-T-E-ETIT-113607 ...........................................................................................................................................................Mensch-machine interaction-T-Info-101266 ................................................................................................................... 449 10.94. 微波技术/微波工程-T-E-ETIT-100802 ...........................................................................................................................................................................................................................................................................................................................................................................................................................................................................................................Mensch-machine interaction-T-Info-101266 ................................................................................................................... 449 10.94.微波技术/微波工程-T-E-ETIT-100802 ...........................................................................................................................................................................................................................................................................................................................................................................................................................................................................................................Microenergy Technology-T-Mach-105557 ................................................................................................................................................................. 微效应-T-MACH-101910 ............................................................................................................................................................................................................................................................................................................................................................................................... 452 10.97。 microsystem technology-T-E-ETIT-100752 ....................................................................................................................... 453 10.98. microwave measurement technology-T-E-ETIT-100733 .................................................................................................................. 454 10.99. Miniating passive microwave circuits-T-E-E-ETIT-108389 ............................................................................... 456 10.101. mmic Design Laboratory-T-E-ETIT-111006 .............................................................................................................. 457 10.102. Mobile Communications II-T-E-ETIT-112679 .......................................................................................................... 458 10.103. Mobile Communications Workshop-T-E-ETIT-113063 ......................................................................................................................................................... Model formation of electrochemical systems-T-E-ETIT-100781 .............................................................................................. 460 10.105.Microenergy Technology-T-Mach-105557 .................................................................................................................................................................微效应-T-MACH-101910 ............................................................................................................................................................................................................................................................................................................................................................................................... 452 10.97。microsystem technology-T-E-ETIT-100752 ....................................................................................................................... 453 10.98. microwave measurement technology-T-E-ETIT-100733 .................................................................................................................. 454 10.99. Miniating passive microwave circuits-T-E-E-ETIT-108389 ............................................................................... 456 10.101. mmic Design Laboratory-T-E-ETIT-111006 .............................................................................................................. 457 10.102. Mobile Communications II-T-E-ETIT-112679 .......................................................................................................... 458 10.103. Mobile Communications Workshop-T-E-ETIT-113063 ......................................................................................................................................................... Model formation of electrochemical systems-T-E-ETIT-100781 .............................................................................................. 460 10.105.microsystem technology-T-E-ETIT-100752 ....................................................................................................................... 453 10.98.microwave measurement technology-T-E-ETIT-100733 .................................................................................................................. 454 10.99. Miniating passive microwave circuits-T-E-E-ETIT-108389 ............................................................................... 456 10.101. mmic Design Laboratory-T-E-ETIT-111006 .............................................................................................................. 457 10.102. Mobile Communications II-T-E-ETIT-112679 .......................................................................................................... 458 10.103. Mobile Communications Workshop-T-E-ETIT-113063 ......................................................................................................................................................... Model formation of electrochemical systems-T-E-ETIT-100781 .............................................................................................. 460 10.105.microwave measurement technology-T-E-ETIT-100733 .................................................................................................................. 454 10.99.Miniating passive microwave circuits-T-E-E-ETIT-108389 ............................................................................... 456 10.101. mmic Design Laboratory-T-E-ETIT-111006 .............................................................................................................. 457 10.102. Mobile Communications II-T-E-ETIT-112679 .......................................................................................................... 458 10.103. Mobile Communications Workshop-T-E-ETIT-113063 ......................................................................................................................................................... Model formation of electrochemical systems-T-E-ETIT-100781 .............................................................................................. 460 10.105.Miniating passive microwave circuits-T-E-E-ETIT-108389 ............................................................................... 456 10.101.mmic Design Laboratory-T-E-ETIT-111006 .............................................................................................................. 457 10.102. Mobile Communications II-T-E-ETIT-112679 .......................................................................................................... 458 10.103. Mobile Communications Workshop-T-E-ETIT-113063 ......................................................................................................................................................... Model formation of electrochemical systems-T-E-ETIT-100781 .............................................................................................. 460 10.105.mmic Design Laboratory-T-E-ETIT-111006 .............................................................................................................. 457 10.102.Mobile Communications II-T-E-ETIT-112679 .......................................................................................................... 458 10.103. Mobile Communications Workshop-T-E-ETIT-113063 ......................................................................................................................................................... Model formation of electrochemical systems-T-E-ETIT-100781 .............................................................................................. 460 10.105.Mobile Communications II-T-E-ETIT-112679 .......................................................................................................... 458 10.103.Mobile Communications Workshop-T-E-ETIT-113063 .........................................................................................................................................................Model formation of electrochemical systems-T-E-ETIT-100781 .............................................................................................. 460 10.105.Modern Radio Systems Engineering-T-E-E-ETIT-100735 .................................................................................................................................................................................................Sample recognition-T-Info-101362 ................................................................................................................................................................... 10.107. Message Technology II / Communications Engineering II-T-ETIT-1110697 ................................................................... 463 10.108. nano- and quantum electronics- T-etit-111232 .................................................................................................. 464 10.109. Nonlinear regulatory systems-T-E-ETIT-100980 .............................................................................................................. 465 10.110. Nonlinear Optics-T-ETIT-101906 ............................................................................................................................... 466 10.111. Numerical Methods - Exam - T -Math -11700 .............................................................................................................. 467 10.112. 部分微分方程T-E-ETIT-104595 ..................................................................................................................................................................................................................................................................................................................................................................................................... 468 10.113。 Optical Design Lab-T-E-ETIT-100756 .................................................................................................................................... 469 10.114.Sample recognition-T-Info-101362 ................................................................................................................................................................... 10.107.Message Technology II / Communications Engineering II-T-ETIT-1110697 ................................................................... 463 10.108. nano- and quantum electronics- T-etit-111232 .................................................................................................. 464 10.109. Nonlinear regulatory systems-T-E-ETIT-100980 .............................................................................................................. 465 10.110. Nonlinear Optics-T-ETIT-101906 ............................................................................................................................... 466 10.111. Numerical Methods - Exam - T -Math -11700 .............................................................................................................. 467 10.112. 部分微分方程T-E-ETIT-104595 ..................................................................................................................................................................................................................................................................................................................................................................................................... 468 10.113。 Optical Design Lab-T-E-ETIT-100756 .................................................................................................................................... 469 10.114.Message Technology II / Communications Engineering II-T-ETIT-1110697 ................................................................... 463 10.108.nano- and quantum electronics- T-etit-111232 .................................................................................................. 464 10.109. Nonlinear regulatory systems-T-E-ETIT-100980 .............................................................................................................. 465 10.110. Nonlinear Optics-T-ETIT-101906 ............................................................................................................................... 466 10.111. Numerical Methods - Exam - T -Math -11700 .............................................................................................................. 467 10.112. 部分微分方程T-E-ETIT-104595 ..................................................................................................................................................................................................................................................................................................................................................................................................... 468 10.113。 Optical Design Lab-T-E-ETIT-100756 .................................................................................................................................... 469 10.114.nano- and quantum electronics- T-etit-111232 .................................................................................................. 464 10.109.Nonlinear regulatory systems-T-E-ETIT-100980 .............................................................................................................. 465 10.110.Nonlinear Optics-T-ETIT-101906 ............................................................................................................................... 466 10.111. Numerical Methods - Exam - T -Math -11700 .............................................................................................................. 467 10.112. 部分微分方程T-E-ETIT-104595 ..................................................................................................................................................................................................................................................................................................................................................................................................... 468 10.113。 Optical Design Lab-T-E-ETIT-100756 .................................................................................................................................... 469 10.114.Nonlinear Optics-T-ETIT-101906 ............................................................................................................................... 466 10.111.Numerical Methods - Exam - T -Math -11700 .............................................................................................................. 467 10.112. 部分微分方程T-E-ETIT-104595 ..................................................................................................................................................................................................................................................................................................................................................................................................... 468 10.113。 Optical Design Lab-T-E-ETIT-100756 .................................................................................................................................... 469 10.114.Numerical Methods - Exam - T -Math -11700 .............................................................................................................. 467 10.112.部分微分方程T-E-ETIT-104595 ..................................................................................................................................................................................................................................................................................................................................................................................................... 468 10.113。Optical Design Lab-T-E-ETIT-100756 .................................................................................................................................... 469 10.114.Optical Design Lab-T-E-ETIT-100756 .................................................................................................................................... 469 10.114.Optical Engineering - T-ETIT-100676 ..........................................................................................................................................470 10.115.Optical Networks and Systems - T-ETIT-106506 ......................................................................................................................471 10.116.医学和生命科学中的光学系统-T-Etit-106462 ........................................................................................................................................................................................................................................................................................... 472 10.117。Optical Transmitters and Receivers - T-ETIT-100639 .............................................................................................................473
通过AlGaN/GaN/InGaN结构实现8 W mm 1,通过N极性GaN HEMT实现94 GHz时8 W mm 1 [3]。这些结果对于商业(5G及以上、汽车雷达)和国防(SATCOM、雷达)应用越来越重要,所有这些应用都在向毫米波频率范围(30 – 300 GHz)推进。为了进一步提高GaN HEMT的优势,我们的研究小组在氮化铝(AlN)缓冲层上引入了HEMT。[4 – 6]通过用AlN替换AlGaN顶部势垒并用AlN替换典型的GaN缓冲层,AlN/GaN/AlN异质结构具有更高的热导率、改善了薄GaN通道(<30nm)的载流子限制,并且与其他传统顶部势垒材料(如AlGaN或InAlN)相比,顶部势垒具有出色的垂直可扩展性。其他研究小组也展示了基于AlN 的器件的有希望的结果,包括基于AlN 衬底的HEMT,在X 波段实现15 W mm 1 [7] ,AlN 缓冲区击穿功率为 5 MV cm 1 [8] 。已经展示了使用AlN 顶部势垒的HEMT,包括GaN HEMT 记录f T = f max 为454/444 GHz,[9 – 11] PAE 为27% ,相关输出功率为1.3 W的W 波段功率放大器,[12] 噪声系数小于2的K a 波段低噪声放大器,[13] 以及40 GHz 时为4.5 W mm 1 [14] 。所有这些器件都基于AlN/GaN/AlGaN 异质结构。 AlN/GaN HEMT 已显示出 Ga 极性 HEMT 在 W 波段的创纪录输出功率,在 94 GHz 时 P out ¼ 4 W mm 1。[15] 除了射频 (RF) HEMT 之外,氮化铝还具有单片集成大电流 GaN/AlN p 型场效应晶体管 (pFET) [16 – 18] 和晶体 AlN 体声波滤波器 [19] 的潜力,这两者都是通过 AlN 缓冲层实现的。SiC 衬底以衬底集成波导 (SIW) 和天线的形式实现了进一步的集成。[20] 这种集成生态系统被称为 AlN 平台,使高功率氮化物互补金属氧化物半导体 (CMOS)、RF 滤波器、单片微波集成电路 (MMIC) 以及 RF 波导和天线共存于一个单片芯片上。[21]
在现代通信标准中,功率放大器(PA)必须在越来越大的动态范围和带宽上实现高效率,同时保持严格的线性要求。效率提高可以通过负载调制体系结构(例如Doherty功率放大器)来实现。但是,基于此概念的放大器通常与线性降解有关。在4G网络中,数字预性用于减轻负载调节的放大器的非线性。但是,5G NR系统的更大带宽和复杂性限制了DPD的适用性。本论文旨在解决高效率功率扩增器的固有线性,以便无需有限的预期,可以充分地进行效率。它专注于负载模块的平衡放大器(LMBA)。LMBA是最近的建筑,作为经典Doherty PA的替代品。这里提出了对LMBA的新数学分析,重点是负载调制轨迹。这种基于阻抗的分析导致开发了一种新方法,用于从主晶体管的载荷测量值中设计线性/有效的功率放大器。将此方法应用于10W gan Hemt,我们表明,在单端配置中具有相似性能的三个不同的放大器在LMBA档案中使用时的性能非常不同。根据我们的理论,LMBA的幅度(AM-AM)和相(AM-PM)畸变取决于负载轨迹。然后,在GAAS技术中使用相同的方法在1W频段1W MMIC放大器上应用。选择它以使相失真最小化,然后可以选择第二个谐波终止以最大化效率。j级第二谐波终止被确定为最佳情况,导致-40.5dBC ACLR(相邻的通道泄漏比),当用10 MHz刺激10 MHz时,在2.4GHz的耗尽效率为40.5%,为8.6db Papr(峰值平均电力比)LTE信号。但是,在这些频率下,第二个谐波终止对功率放大器的效率的影响很小。缺乏这种额外的自由度,不能为缓解AM-PM选择载荷轨迹,并且效率/线性权衡会降低。最后,提出了阻抗不匹配在功率放大器中的起源和影响。研究了输出阻抗不匹配下负载调制平衡放大器的性能。我们观察到,如果未在输出处显示最佳阻抗,则会取消LMBA的效率提高。然后提出了一种新型的双重平衡LMBA,以实现高效率功率放大器中的不匹配弹性。
关键词:高电子迁移率晶体管 (HEMT)、磷化铟 (InP)、高频、制造摘要自 DARPA 太赫兹电子项目结束以来,诺斯罗普·格鲁曼公司 (NG) 一直致力于将工艺过渡到 100 毫米,并使先进的 InP HEMT 技术适用于高可靠性 A 类空间应用。NG 的 100 nm InP HEMT 节点目前处于制造就绪水平 (MRL) 9,而砷化铟复合通道 (IACC) 节点处于 MRL 3/4。为了提高 IACC 的 MRL,NG 一直致力于将工艺从材料生长转移到晶圆加工到 100 毫米生产线,并利用 100 nm InP HEMT 工艺的制造和认证专业知识。在整个工艺转移和成熟过程中,NG 克服了工艺重现性、产量和吞吐量方面的挑战,并进行了广泛的可靠性测试。引言在过去二十年中,在美国国防高级研究计划局、美国宇航局/喷气推进实验室和三军的资助下,诺斯罗普·格鲁曼公司 (NG) 通过积极缩小 InP HEMT 尺寸并使用超高迁移率砷化铟复合通道 (IACC) HEMT 结构,展示了高达太赫兹的高电子迁移率晶体管 (HEMT) [1,2] 和单片微波集成电路 (MMIC) [3-6],如表 1 所示。InP 和 IACC HEMT 的关键制造步骤是分子束外延 (MBE)、电子束光刻 (EBL) 栅极、基板通孔 (TSV) 以及缩放互连和钝化工艺。材料生长和制造工艺最初是在 NG 的 75 毫米生产线上开发的。NG 致力于技术成熟工作,以缩小制造差距,以提高 IACC 节点的 MRL [7]。工艺概述 InP 和 IACC HEMT 晶圆采用分子束外延法在半绝缘 InP 衬底上生长。IACC 外延剖面具有复合通道,该通道由夹在两个晶格匹配的 In x Ga 1-x As 层之间的 InAs 层组成 [2]。高电子迁移率 InAs 通道是高频低直流功率操作的关键推动因素。肖特基势垒层和重掺杂帽经过优化,可实现低
