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•4 4''磁控元音源用于共沉积（目前为1个脉冲DC，2 rf电源）•援助源EH200HC（尚未要求，但请求额外的资金）•高真空度（<6×10 -8 mbar）•5个速度（ar，o2，n2，.. diameter • Substrates up to 125 mm diameter, up to 20 mm thickness • Rotated substrate holder , heating up to 700°C • Predisposition for RF susbtrate bias • Predisposition for several in-situ diagnostics : RGA, ellipsometry, energy-mass spectrometry, stress/curvature measurement, optical(photon) emission monitor, ..
量子增强机器学习，用于分类物质的量子阶段
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