摘要:2- µm波段已被认为是下一代低损失,低延迟光学通信的潜在电信窗口。热光(TO)调节器和开关,它们是大规模集成光子电路中必不可少的构件,其性能直接影响芯片光子系统的能耗和重新配置时间。基于2 µm波带的金属加热器调制之前,响应时间缓慢和高功耗。在本文中,展示了在2- µm波段的工作,高性能的热马赫德干涉仪和环谐振器调节器。By embedding a doped silicon (p ++ -p-p ++ ) junction into the waveguide, our devices reached a record modulation efficiency of 0.17 nm/mW for Mach–Zehnder interferometer based modulator and its rise/fall time was 3.49 µ s/3.46 µ s which has been the fastest response time reported in a 2- µ m-waveband TO devices so far.对于基于环的谐振器调节器,在2- µm的设备中,在2- µm中的最低Pπ功率为3.33 mW。
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